Manufacturing method of ink jet printer head

摘要

A method for manufacturing an ink jet printer head is disclosed which the method comprises steps of providing a substrate; forming a crater layer by photolighography and plating under the substrate; forming a nozzle plate by photolighography and plating under the crater layer; forming a channel plate by photolighography and plating under the nozzle plate; forming a reserver plate by photolighography and plating under the channel plate; forming a restrictor plate by photolighography and plating under the reserver plate; forming a chamber plate by photolighography and plating under the restrictor plate; forming a vibration plate by plating under the chamber plate; removing the substrate; removing all photoresist remaining; forming a piezoelectric/electrostrictive film to actuate when electrified upon the vibration plate; and forming an upper electrode upon the piezoelectric/electrostrictive film.