MICRO ION PUMP AND METHOD FOR MAINTAINING HIGH VACUUM WITHIN LOW-PRESSURE MICROENCLOSURE

摘要

PURPOSE: A micro ion pump and a method for maintaining high vacuum within a low-pressure microenclosure are provided to remove gas molecules from the interior of the low-pressure microenclosure and to maintain a low-pressure environment surrounding an enclosed microdevice. CONSTITUTION: A micro ion pump included within a low-pressure microenclosure(306) comprises a first charge plate(308); a second charge plate(310) separated from the first charge plate by a distance; and a circuit(316, 318) coupled to the first charge plate and the second charge plate establishing a voltage potential differential between the first charge plate and the second charge plate. The voltage potential differential induces an electric field in which gas molecules within the low-pressure microelectronic device collide with electrons accelerated in the electric field to produce ions accelerated in a direction opposite to the electrons so that the ions adsorb to the more negative of the first and second charge plates.