| 摘要 |
PROBLEM TO BE SOLVED: To ensure extraction of the contour of a pattern of interest by achieving proper brightness for an area to be observed without allowing a microscopic image on a display to be affected by the brightness of an ambient image within a viewing field and to support a series of operations when making measurements of the shape of a fixed form. SOLUTION: For the adjustment of brightness in a scanning microscope, the scanning microscope includes a means for designating a desired area of a microscopic image, a means for designating the average brightness of the image within the designated area, and a means for adjusting the brightness of the overall microscopic image according to the designated amount of adjustment of brightness, whereby the image in the designated area can be displayed in the proper brightness without being affected by an ambient image within a viewing field. The scanning microscope also includes a means for implementing a series of cross-section machining/pattern-of-interest access programs, from machining of a cross-sectional part to the acquisition of a microscopic image of the cross sectional part V through the tilting of a sample stage, and a means for measuring the shape of the pattern P of interest in accordance with the programs, whereby the shape of the pattern formed on the cross-sectional part of the sample can be measured automatically.
|
