CRYSTAL GROWTH APPARATUS AND METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a crystal growth apparatus and method therefor which realize uniform growth of crystal element in the whole area crystal growth on the substrate. SOLUTION: The crystal growth apparatus for growth of crystal element on the predetermined area of a substrate includes a temperature detecting means for detecting temperature of the entire part of the predetermined area of the substrate where the crystal element grows, by scanning the entire area of the predetermined area of the substrate where a crystal element grows when the crystal element grows to the predetermined area of the substrate.