发明名称 CIRCUIT PATTERN INSPECTION APPARATUS, CIRCUIT PATTERN INSPECTION METHOD, AND RECORDING MEDIUM
摘要 <p>A circuit pattern inspection apparatus capable of reliably and easily detecting a defect of a circuit board. The apparatus is for inspecting a circuit board having a common pattern (20) consisting of stripes whose tip ends are arranged in rows and whose basic portions are connected to one another and a flow pattern group (30) arranged between the stripes of the common pattern (20) and not connected to any other pattern. When performing inspection, an AC signal is supplied alternately to these patterns and the one not supplied with the AC signal is connected to the ground level. The AC signal is detected by sensors (131, 132, 133) arranged at the tip ends.</p>
申请公布号 WO2002101398(P1) 申请公布日期 2002.12.19
申请号 JP2002004991 申请日期 2002.05.23
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