发明名称 |
POLISHING PADS WITH POLYMER FILLED FIBROUS WEB, AND METHODS FOR FABRICATING AND USING SAME |
摘要 |
A polishing pad having a body comprising fibers embedded in a matrix polymer formed by a reaction of polymer precursors. The fibers define interstices, a nd the precursors fill these interstices substantially completely before completion of the reaction. The pad may include a thin layer of free fibers at its polishing surface. A segment of at least a portion of the free fibers ar e embedded in the adjacent body of the polymer and fibers. The fibers may be separate, or in the form of a woven or non-woven web.
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申请公布号 |
CA2441419(A1) |
申请公布日期 |
2002.12.19 |
申请号 |
CA20012441419 |
申请日期 |
2001.11.20 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION;FREUDENBERG NONWOVENS, L.P. |
发明人 |
DAVIS, KENNETH M.;BILLINGS, SCOTT CLAYTON;GILBRIDE, DAVID S.;VANGSNESS, JEAN;RODBELL, KENNETH P.;CHEN, SHYNG-TSONG;HSU, OSCAR KAI CHI |
分类号 |
B24B37/00;B24B37/04;B24B37/24;B24D3/28;B24D11/00;B24D13/14;C08J5/14;H01L21/304;(IPC1-7):B24D11/00;B24B1/00;B27N3/18 |
主分类号 |
B24B37/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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