| 摘要 |
Single-wavelength laser light of from visible to infrared range generating from a DFB semiconductor laser is amplified by a fiber optical amplifier, and the amplified laser light is converted to illumination light of ultraviolet range by a wavelength converting portion. To detect optical characteristics of an optical system, of an exposure apparatus, through which exposure light passes, the illumination light illuminating a mark for evaluation is detected by an photo detector through the optical system. The output signal of the photodetector is normalized by an integrated energy on a plurality of pulse basis.
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