III nitride film and a III nitride multilayer

摘要

A III nitride multilayer including a given substrate, a III nitride underfilm including Al element of 50 atomic percentages or over for all of the II elements, and a III nitride film including Al element in lower Al content than the Al content of the III nitride underfilm by 10 atomic percentages or over. A full width at half maximum in X-ray rocking curve of the III nitride film is set to 800 seconds or below at (100) plane. A full width at half maximum in X-ray rocking curve of the III nitride film is set to 200 seconds or below at (002) plane.