发明名称 Coating liquid for forming a silica group coating film having a small dielectric constant
摘要 A coating liquid for forming a silica group coating film having a dielectric constant equal to or less than 3.2, comprises a condensation product which is obtained through hydrolysis of trialkoxysilane within an organic solvent under an acid catalysis; and at least one of polyalkylene glycol and the end alkylation product thereof. The addition amount of the at least one of polyalkylene glycol and the end alkylation product thereof is 10-500 weight % with respect to the solid component of the coating liquid, and the weight-average molecular weight of the polyalkylene glycol and the end alkylation product thereof is 100-10,000.
申请公布号 US2002192981(A1) 申请公布日期 2002.12.19
申请号 US20020216998 申请日期 2002.08.12
申请人 TOKYO OHKA KOGYO CO., LTD. 发明人 FUJII YASUSHI;MATSUSHITA ATSUSHI
分类号 H01L21/302;H01B3/46;H01L21/027;H01L21/3065;H01L21/3105;H01L21/311;H01L21/312;H01L21/3205;H01L21/768;(IPC1-7):H01L21/31 主分类号 H01L21/302
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