发明名称 Laser-assisted silicide fuse programming
摘要 A method is provided, the method comprising programming a silicide fuse by passing a current through the silicide fuse while substantially simultaneously irradiating the silicide fuse with a laser.
申请公布号 US2002192879(A1) 申请公布日期 2002.12.19
申请号 US20010864755 申请日期 2001.05.24
申请人 TSUI TING YIU 发明人 TSUI TING YIU
分类号 H01L23/525;(IPC1-7):H01L21/82 主分类号 H01L23/525
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