POSITION MEASUREMENT DEVICE FOR PAD CONDITIONER HEAD OF CMP DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a position measurement device for the pad conditioner head of a CMP(Chemical Mechanical Polishing) device capable of calibrating the position thereof so that the edge of the conditioner head can come accurately into contact with the edge of a platen. SOLUTION: This position measurement device 100 comprises a first horizontal part 101 having a reference surface 102 formed to come into contact with the outer peripheral surface of the vertically formed platen of the CMP device formed horizontally at one end thereof, a second horizontal part 103 horizontally formed above the first horizontal part 101 apart a specified distance from the first horizontal part 101 and having a reference scale 107 at a position matching when the reference surface 102 is vertically expanded, and a connection part 105 fixedly connecting the first horizontal part 101 to the second horizontal part 103.