摘要 |
An airlock for a clean room has an upright cylindrical shape with two doors either at an angle, or in line for a straight through passage. The sidewalls of the airlock are double skinned with one wall having a porous structure to filter in a clean air stream to remove dust etc. The excess airflow is ducted through a hollow base of the airlock and up the inside of the other double skinned wall, to a collection chamber on top of the airlock, where a fan draws away the excess air. |