SYSTEM AND METHOD OF RECOVERING SOURCE MATERIAL FORM CVD WASTE GAS

摘要

PROBLEM TO BE SOLVED: To provide a system and a method of recovering a source material from a CVD waste gas, by which the unreacted CVD source material is efficiently recovered. SOLUTION: In the system and the method of recovering the source material from the CVD waste gas, (a) a liquid reservoir is provided in a pipe line between a CVD waste gas discharge port and an exhaust pump, (b) the liquid reservoir is provided at a position lower than the CVD waste gas discharge port and the inclination of the pipe line between the CVD waste gas discharge port and the liquid reservoir is controlled to be not positive in any position from the CVD waste gas discharge port toward the liquid reservoir and (c) the liquid reservoir is provided at a position lower than the exhaust pump and the inclination of the pipe line between the liquid reservoir and the exhaust pump is controlled to be not negative in any position from the liquid reservoir toward the exhaust pump.