发明名称 |
Opto-electronic hybrid integration platform, optical sub-module, opto-electronic hybrid integration circuit, and process for fabricating platform |
摘要 |
An opto-electronic hybrid integrated circuit, characterized by comprising an opto-electronic hybrid platform, said platform including an optical waveguide including an under-clad, a core, and an over-clad; a silicon terrace, a dielectric layer, and a conductor pattern provided inside or on the surface of said dielectric layer; thickness of said dielectric layer being set so that height of said conductor pattern is substantially equal to a height of said optical waveguide over-clad surface; a carrier having an optical device holding surface for holding an optical device, a carrier height reference surface located at a predetermined distance from said optical device holding surface, and a carrier electrical wiring; and an optical device held on said optical device holding surface; wherein a height from said optical functional device active layer to said carrier height reference surface is set nearly equal to a step between said optical waveguide core and said silicon terrace upper surface; said carrier electrical wiring and an active layer side electrode of said optical functional device are electrically connected forming an optical sub-module; a silicon terrace of said opto-electronic hybrid packaged substrate and said carrier height reference surface of said optical device sub-module contact, and said conductor pattern on said dielectric layer of said opto-electronic hybrid packaged substrate and said carrier electrical wiring of said optical sub-module are electrically connected. <IMAGE> |
申请公布号 |
EP1089101(A8) |
申请公布日期 |
2002.12.18 |
申请号 |
EP20000123647 |
申请日期 |
1994.08.08 |
申请人 |
NIPPON TELEGRAPH AND TELEPHONE CORPORATION |
发明人 |
YAMADA, YASUFUMI;MINO, SHINJI;OGAWA, IKUO;TERUI, HIROSHI;YOSHINO, KAORU;KATO, KUNIHARU;MORIWAKI, KAZUYUKI;SUGITA, AKIO;YANAGISAWA, MASAHIRO;HASHIMOTO, TOSHIKAZU |
分类号 |
G02B6/42;H01S5/02;H01S5/062;H01S5/20;(IPC1-7):G02B6/42 |
主分类号 |
G02B6/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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