| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device capable of improving yield by suppressing a trouble resulted from the presence of foreign matter. SOLUTION: A suction port 14 is provided on the opening surface 11M of a printed board 11 in a probe card 10. In the inspection of a CCD chip 40, foreign matter, such as dust in the atmosphere or the like, remaining rear a probe pin 13 is sucked through the suction port 14 and removed. Since the possibility of the foreign matter remaining around the probe pin 13 is reduced, problems such as point defects or short circuiting can be suppressed, and the yield of the CCD chip 40 is improved.
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