A method of melting a rod of crystalline material zone-by-zone

摘要

A monocrystalline silicon rod is produced from a supply rod of half its diameter by a floating zone-melting process using a pan-cake induction coil in which the recrystallized rod is rotated and shifted laterally to and fro with respect to the supply rod and coil at a speed of 5-20 cycles/min. The recrystallized rod may be withdrawn upwards or downwards from the molten zone. The supply rod may also be rotated. The lateral shift path may be rectilinear or part of a circle.