发明名称 METHOD FOR FABRICATING WAFER LEVEL PACKAGE
摘要 PURPOSE: A method for fabricating a wafer level package is provided to eliminate the need to perform a sputtering process for forming a metal interconnection, by fabricating the metal interconnection by a stencil print method. CONSTITUTION: A semiconductor chip(200) of a wafer level is prepared on which a plurality of chip pads(202) are formed. The first insulation layer having the first opening(214) exposing the chip pad is formed on the semiconductor chip. A stencil mask having the second opening exposing the first opening is formed. The metal interconnection(210) is formed to cover the second opening by a stencil print method using the stencil mask. The second insulation layer having the third opening exposing a ball land region(211) of the metal interconnection is formed on the first insulation layer. Conductive balls(220) are settled in the ball land region.
申请公布号 KR20020093257(A) 申请公布日期 2002.12.16
申请号 KR20010031724 申请日期 2001.06.07
申请人 HYNIX SEMICONDUCTOR INC. 发明人 KIM, JI YEON
分类号 H01L21/60;(IPC1-7):H01L21/60 主分类号 H01L21/60
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