APPARATUS FOR ADDING CARBON DIOXIDE TO DEIONIZED WATER

摘要

PURPOSE: An apparatus for adding carbon dioxide to deionized water is provided to supply the deionized water having more accurate precision of resistance, by installing a resistance measuring sensor for measuring the resistance of the deionized water and a pressure measuring sensor for measuring the pressure of the deionized water. CONSTITUTION: A deionized water supplying unit(100) supplies deionized water of predetermined resistivity. A carbon dioxide supplying unit(120) supplies carbon dioxide to the deionized water supplied from the deionized water supplying unit. A pressure detecting sensor detects the pressure of the deionized water including carbon dioxide. A control valve controls the quantity of carbon dioxide supplied from the carbon dioxide supplying unit according to the pressure detected by the pressure detecting sensor.