摘要 |
PROBLEM TO BE SOLVED: To provide a droplet removing method by which the droplet of a coating film deposited in the arc-type physical vapor deposition process can be easily and reliably removed without damaging the film, and evaluating adhesivity of the coating film simultaneously with removal of the droplet. SOLUTION: A work 1 with TiN film 12 formed thereon is moved at a speed of 1 mm/sec., and high-pressure water of 1,500 kgf/cm<2> is ejected against the TiN film 12 at the distance L of ejection of 25 mm, and the angle Q of ejection of 90 deg.. The droplet 2 adhered to the TiN film is removed by the high- pressure water. If the adhesivity of the TiN film 12 is low, the TiN film 12 is peeled simultaneously with removal of the droplet 2, and the adhesivity of the TiN film can be reliably evaluated by a simple visual inspection.
|