发明名称 FERROELECTRIC SUBSTANCE STORAGE DEVICE AND ELECTRONIC APPARATUS
摘要 <p>PROBLEM TO BE SOLVED: To improve square property of a hysteresis curve of a ferroelectric substance layer, in a ferroelectric substance storage device having a matrix type memory cell array which is excellent in the level of integration. SOLUTION: A structure is used in which the memory cell array 200 and a peripheral circuit 100 are arranged as isolated from each other on a plane. The ferroelectric substance layer 34 is epitaxially grown on Si single crystal 10 via a buffer layer 30 and a first signal electrode 32. Consequently, the square property of a hysteresis curve of the ferroelectric substance layer 34 is improved, and a ferroelectric substance storage device which has both the memory characteristic and the level of integration is realized.</p>
申请公布号 JP2002359357(A) 申请公布日期 2002.12.13
申请号 JP20020073092 申请日期 2002.03.15
申请人 SEIKO EPSON CORP 发明人 HIGUCHI AMAMITSU;IWASHITA SETSUYA;MIYAZAWA HIROSHI;HASEGAWA KAZUMASA;NATORI EIJI
分类号 G11C11/22;H01L21/02;H01L21/316;H01L21/8246;H01L27/105;H01L27/115;(IPC1-7):H01L27/105 主分类号 G11C11/22
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