发明名称 |
FERROELECTRIC SUBSTANCE STORAGE DEVICE AND ELECTRONIC APPARATUS |
摘要 |
<p>PROBLEM TO BE SOLVED: To improve square property of a hysteresis curve of a ferroelectric substance layer, in a ferroelectric substance storage device having a matrix type memory cell array which is excellent in the level of integration. SOLUTION: A structure is used in which the memory cell array 200 and a peripheral circuit 100 are arranged as isolated from each other on a plane. The ferroelectric substance layer 34 is epitaxially grown on Si single crystal 10 via a buffer layer 30 and a first signal electrode 32. Consequently, the square property of a hysteresis curve of the ferroelectric substance layer 34 is improved, and a ferroelectric substance storage device which has both the memory characteristic and the level of integration is realized.</p> |
申请公布号 |
JP2002359357(A) |
申请公布日期 |
2002.12.13 |
申请号 |
JP20020073092 |
申请日期 |
2002.03.15 |
申请人 |
SEIKO EPSON CORP |
发明人 |
HIGUCHI AMAMITSU;IWASHITA SETSUYA;MIYAZAWA HIROSHI;HASEGAWA KAZUMASA;NATORI EIJI |
分类号 |
G11C11/22;H01L21/02;H01L21/316;H01L21/8246;H01L27/105;H01L27/115;(IPC1-7):H01L27/105 |
主分类号 |
G11C11/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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