发明名称 SEMICONDUCTOR LIGHT RECEPTION ELEMENT
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor light reception element which has high detection sensitivity by reducing a dark current. SOLUTION: A semiconductor light emitting element 20 is equipped with a substrate 11 made of sapphire single crystal, etc., and a nitride semiconductor layer group which includes Al formed directly on the substrate 11 by epitaxial growth and has <=10<10> /cm<2> transition density. This nitride semiconductor layer group is composed of an n-type conductive layer 14, a light reception layer 15, and a p-type conductive layer 16. Then an n-type electrode 17 is formed on an exposed part of the n-type conductive layer 14, and a p-type electrode 18 is formed on the p-electrode 16.
申请公布号 JP2002359390(A) 申请公布日期 2002.12.13
申请号 JP20010162848 申请日期 2001.05.30
申请人 NGK INSULATORS LTD 发明人 SHIBATA TOMOHIKO;SUMIYA SHIGEAKI;ASAI KEIICHIRO;TANAKA MITSUHIRO
分类号 C23C16/34;H01L21/205;H01L31/10;(IPC1-7):H01L31/10 主分类号 C23C16/34
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