| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly reliable acceleration sensor easily manufactured at a low cost and provide its manufacturing method. SOLUTION: This acceleration sensor is provided with a fixed electrode 50 having multiple first rod patterns aligned mutually parallel on a substrate surface, a movable electrode 40 having multiple second rod patterns opposed to the respective first rod patters at prescribed intervals apart therefrom, and a displaceable mass member 31 connected to the movable electrode 40. The mass member 31 is mainly composed of a polyimide thin material 2 so as to be easily manufactured in a short time compared with a conventional constitution using the polysilicon film, shorten the construction term, and reduce the cost. Silicon nitride films 3a and 3b, or flattening films are provided on a pair of main surfaces 2a and 2b of the polyimide thin material 2 to suppress the warp of the thin material 2 so that the relative position and distance between the movable electrode 40 and the fixed electrode 50 can be precisely formed and the reliability is improved. |
