METHOD FOR PRODUCING SEMICONDUCTOR COMPONENTS

摘要

The invention relates to a method for producing small crystalline laminae, such as semiconductor elements, especially LEDs. At least one crystalline layer is deposited on a crystalline substrate, the layer(s) is/are then separated from the substrate, and the sections formed in the laminae are divided. In order to simplify the individual separation, the substrate (1) is pre-structured in fields (3) corresponding to the sections (7), and the lattice constants of the substrate (1) and the layer(s) (9, 10) are distanced from each other in such a way that separating cracks are formed on the field boundaries (4) as a result of the lattice strain.