Method of eliminating leakage current in shallow trench isolation

摘要

A method of eliminating leakage current in shallow trench isolation is disclosed. After the trench is formed on the substrate, the liner oxide layer is formed in the furnace by introducing transdichloroethylene (TLC) into the furnace to round the corner of the trench. An electric filed near the rounded trench corner is decreased; thus, the leakage current produced in the corner of the shallow trench isolation is eliminated.