发明名称 |
Thermo pile infrared ray sensor manufactured with screen print and method thereof |
摘要 |
In a thermo pile infrared ray sensor, an opening portion is formed by etching a substrate from a second surface after an n-type poly-Si layer and a thin aluminium layer are formed so that first and second connection portions are formed by parts thereof. An infrared ray absorbent layer is formed on the substrate to cover the first connection portion with a screen print after the opening portion is formed.
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申请公布号 |
US2002185169(A1) |
申请公布日期 |
2002.12.12 |
申请号 |
US20020164603 |
申请日期 |
2002.06.10 |
申请人 |
HAMAMOTO KAZUAKI;YOSHIDA TAKAHIKO;SUZUKI YASUTOSHI;TOYODA INAO |
发明人 |
HAMAMOTO KAZUAKI;YOSHIDA TAKAHIKO;SUZUKI YASUTOSHI;TOYODA INAO |
分类号 |
G01J5/12;H01L35/34;(IPC1-7):B05D5/12;H01L35/28 |
主分类号 |
G01J5/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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