METHOD FOR PLASMA DEPOSITION OF POLYMER COATINGS

摘要

The method of plasma deposition of polymer coatings involves locating a sample to be treated in a discharge volume, filling a discharge chamber (1) by means of a working gas supply system (2) with a reactive gas containing at least one plasma polymerizable gas-monomer, and plasma generation in the discharge volume through the ignition and maintaining of a pulsed-periodic gas discharge with a periodically repeated sequence of pulses. During plasma polymerization of the gas-monomer, a polymer coating is deposited onto the surface of the sample. To do that, a pulsed-periodic discharge is used with the total current variation time of a separate pulse within the range of from 10-7 s to 10-1 s. The time interval between separate pulses in each sequence of pulses is selected within the range of from 10-5 s to 10-2 s. The invention allows the efficiency of plasma polymerization process to be increased and continuous processing to be enabled.