发明名称 Semiconductor laser device and process for producing the same
摘要 The present invention relates to a ridge-stripe semiconductor laser device and a process for producing the same. More specifically, the object of the present invention is to control the formation of cavities at the side of the ridge without adding any step, and to provide a ridge stripe semiconductor laser device with good properties by strictly controlling its ridge width and a process for producing the same. Thereby, it is possible to form a ridge whose sidewalls stand almost vertically.
申请公布号 US2002187577(A1) 申请公布日期 2002.12.12
申请号 US20020166032 申请日期 2002.06.11
申请人 SHARP KABUSHIKI KAISHA 发明人 SAKATA MASAHIKO;TSUNODA ATSUO
分类号 H01L21/3065;H01L21/306;H01S5/20;H01S5/223;H01S5/343;(IPC1-7):H01L21/00 主分类号 H01L21/3065
代理机构 代理人
主权项
地址