TURBOMOLECULAR PUMP

摘要

A turbomolecular pump (10) comprises a stator, a pump rotor, a motor (28) for driving the pump rotor and a control device (42). The control device (42) controls the motor output as to prevent the motor output from exceeding a permissible motor maximum output. Stator-side temperature sensors (32-38), which are provided for measuring the stator temperature, are arranged on the turbomolecular pump (10). The control device (42) comprises a maximum output determining device (50), that establishes the permissible motor maximum output according to the measured stator temperature. The permissible motor maximum output is thus not set to a constant value, but is always determined according to the stator temperature. This results in the power of the motor being fully exploited as long as the measured stator temperature is less than a maximum value.