| 摘要 |
<p>A heat sink comprising a ceramic insulating base and a diamond film formed on the base so as to mount a device on it,having an excellent heat dissipation properties,and used stably.The base is made of a ceramic mainly containing aluminum nitride having a high heat conductivity.An adhesion member layer such as a silicon film securable to the base and the diamond film is formed on the base,and a polycrystalline diamond film of high quality securely adhered to the base,with the adhesion member layer interposed therebetween is formed by CVD on the adhesion member lager,thus fabricating a heat sink.</p> |
