Electric arc vaporizing device used in production of hard material layers on substrates comprises anode, target, voltage, and magnet arrangement formed as one unit

摘要

An electric arc vaporizing device comprises an anode; a target (16) acting as cathode; a voltage source for connecting the anode and cathode to produce an electric arc or arc spots on the target; and a magnet arrangement formed as one unit from a permanent magnet (52) and a coil (50) for producing a magnetic field. Preferred Features: The permanent magnet and the coil are arranged in a holder (48) made from plastic or aluminum. The unit can be adjusted parallel to the target surface running in the X- and Y-direction.