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摘要
申请公布号
JP3355851(B2)
申请公布日期
2002.12.09
申请号
JP19950047545
申请日期
1995.03.07
申请人
发明人
分类号
H01L29/78;H01L21/322;H01L21/331;H01L21/336;H01L29/08;H01L29/739;(IPC1-7):H01L21/336
主分类号
H01L29/78
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