| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-pressure processor stabilizing substrate processing by recognizing the liquid chemical density in high-pressure processing fluid in circulation processing, accurately recognizing the time of the completion of the substrate processing and optimally controlling the liquid chemical density. SOLUTION: A density controller 12 controls valve opening and closing and makes an auxiliary agent supplied to a mixer 10, so as to turn density in supercritical carbon dioxide to a prescribed value. The mixer 10 mixes the agent and the supercritical carbon dioxide and sends out the supercritical carbon dioxide, in which the agent is mixed for prescribed density through a density detector 11 to a substrate washing tank 5. When substrate cleaning, for which the supercritical carbon dioxide mixed with the agent is circulated is performed, the density detector 11 detects the agent density in the supercritical carbon dioxide and the density controller 12 controls the valve opening and closing, so as to keep the agent density at the prescribed value at all times according to the detected density. In the case that the detected agent density is stabilized, the density controller 12 determines the substrate-cleaning completion and stops the supply of the agent.
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