DIFFUSION PREVENTIVE FILM FORMING TARGET

摘要

PROBLEM TO BE SOLVED: To provide a target for forming a diffusion preventive film. SOLUTION: This target is characterized in that a fish eye compound phase of a Cr11 Ge19 phase and a Cr3 Ge phase surrounded by Cr11 Ge19 phase or a Cr11 Ge19 phase and a fish eye compound phase are mixed and dispersed in the Ge base for the target for forming a diffusion preventive film which has composition consisting of Ge of 50 to 95 atom %, and Cr of 5 to 50 atom %.