| 摘要 |
PROBLEM TO BE SOLVED: To provide a laminated piezoelectric actuator of high displacement and high reliability, having few cracks in the piezoelectric ceramics and dislocations in the insulation film. SOLUTION: A plurality of small-unit piezoelectric actuators 13, where a piezoelectric ceramics 11 and an internal electrode layer 12 are alternatively stacked by a plurality of sheets, are connected together using an adhesive, via an insulating plate 14 in between. They are electrically connected, using external electrodes 16a and 16b disposed to the plurality of insulating plates 14 and small-unit piezoelectric actuators 13.
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