| 摘要 |
The invention relates to a method for covering a support (30) with a layer of particles arising from a target entity (20), said method comprising the implementation of an ion source (10) for directing an ion beam (100) towards said target entity in order to create a particle flux (F) arising from the interaction between the ion beam and the target entity, with a view to depositing at least one part of the particle flux on the support, characterized in that the method involves setting the ion beam into motion between the ion source and the target entity in order to scan the target entity in such a way that coverings are created, said coverings having a controlled thickness according to a desired profile.The invention also relates to a structure and a filter made according to said method. |
