发明名称 NONVOLATILE SEMICONDUCTOR MEMORY, AND METHOD OF MANUFACTURING NONVOLATILE SEMICONDUCTOR MEMORY
摘要 PURPOSE: To provide a nonvolatile semiconductor memory which allow reducing adverse effects from writing in each storage cell on the storing status of other storage cell, preventing malfunctions, and increasing reliability, and a method of manufacturing the same. CONSTITUTION: In the nonvolatile semiconductor memory which includes a device area and a device separating area, the storage cell comprises a channel area, a gate insulating film formed on the channel area, a floating gate electrode formed on the gate insulating film, a second gate insulating film formed on the floating gate electrode, a control electrode formed on the second insulating film, and a source/drain region which is so formed as to horizontally sandwich a channel region therebetween. The device separating area comprises a device separating insulator, and a conductor which extends through the inside of the device separating insulator in a horizontal direction substantially parallel to the direction in which the source/drain region sandwiches the channel area. During writing operation, the conductor prevents the effect of the voltage from being transmitted to adjacent cells.
申请公布号 KR20020090905(A) 申请公布日期 2002.12.05
申请号 KR20020029512 申请日期 2002.05.28
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 KOBAYASHI HIDEYUKI;TSUNODA HIROAKI
分类号 H01L21/76;H01L21/8247;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L27/115 主分类号 H01L21/76
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