Resonant scanner has drive formed from stator electrode and coil, for exerting force directly onto drive plate, with periodic function adapted to resonant frequency of mirror

摘要

A drive plate (4) within a frame (3) is fixed by two torsion springs (6) so that it can oscillate about a torsion axis (8). A mirror (5) is fixed by two further torsion springs (7) so that is can oscillate about a torsion axis (9). A stator electrode (15) and coil (24) are arranged to form a drive on the base (11) of the stator part (2), to exert a force directly on the drive plate. The force follows a periodic function whose period is adapted to the resonant frequency of the mirror, which is different from the resonant frequency of the drive plate.