发明名称 |
High pressure processing apparatus and high pressure processing method |
摘要 |
A high-pressure processing apparatus includes a processing vessel including a processing chamber formed therein to perform a certain process onto an object in the processing chamber; fluid feeding means which feeds a high-pressure fluid into the processing chamber; fluid discharging means which discharges the high-pressure fluid from the processing chamber; an agitating unit which is arranged in the processing chamber and is operative to flow the high-pressure fluid over the object by relative rotation to the processing vessel; a communicating channel which is formed in the processing vessel to communicate inside and outside of the processing chamber; a rotary driving member which is coupled to the agitating unit via a shaft portion provided in the communicating channel; and a sealing portion which is provided between the shaft portion and the processing vessel to disconnect the processing chamber from the rotary driving member. The fluid discharging means includes a fluid discharging port formed in a certain position of the communicating channel closer to the processing chamber than the sealing portion to discharge the high-pressure fluid.
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申请公布号 |
US2002179114(A1) |
申请公布日期 |
2002.12.05 |
申请号 |
US20020131193 |
申请日期 |
2002.04.25 |
申请人 |
KABUSHIKI KAISHA KOBE SEIKO SHO (KOBE STEEL, LTD) |
发明人 |
SAKASHITA YOSHIHIKO;WATANABE KATSUMI;YAMAGATA MASAHIRO;OSHIBA HISANORI;SARUMARU SHOGO;MURAOKA YUSUKE;SAITO KIMITSUGU;MIZOBATA IKUO;KITAKADO RYUJI |
分类号 |
B08B7/00;H01L21/00;(IPC1-7):B08B3/00 |
主分类号 |
B08B7/00 |
代理机构 |
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代理人 |
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