| 摘要 |
<p>A method for manufacturing a probe card, which comprises a step of forming a plurality of amorphous alloy layers exhibiting a supercooling liquid temperature region and having a predetermined shape on a predetermined substrate, a step of heating the amorphous alloy layers to the supercooling liquid temperature region, a step of cooling the amorphous alloy layers to a temperature lower than the supercooling liquid temperature region, and a step of removing at least a part of the predetermined substrate in the state wherein the amorphous alloy layers are cooled to a temperature lower than the supercooling liquid temperature region.</p> |
