摘要 |
<p>A valve (10(1) or 10(2)) which has a structure with at least one opening (14(1) or 14(2)) and a member (16) which has a fixed static charge and also has a first position exposing the opening (14(1) or 14(2)) and a second position sealing the opening (14(1) or 14(2)). A method for making the valve (10(1) or 10(2)) includes providing a structure (12(1)) with at least one opening (14(1) or 14(2)) and providing a member (16) having a fixed static charge when the member (16) has a first position exposing the opening (14(1) or 14(2)) and a second position sealing the opening (14(1) or 14(2)). A pump (50) includes a base with at least one trench (52), a structure (12(1)) with at least two openings (14(1) or 14(2)), a membrane (16(3) or 16(4)) with a fixed static charge, a first cantilever (16(1)) arm having a fixed static charge. The first cantilever arm (16(1)) has a first position exposing one of the openings (14(1) or 14(2)) and a second position sealing the one of the openings (14(1) or 14(2)). The second cantilever arm (16(2)) has a first position exposing another one of the openings (14(1) or 14(2)) and a second position sealing another one of the openings (14(1) or 14(2)).</p> |