发明名称 |
Thin film lithium niobate and method of producing the same |
摘要 |
Metal oxide films such as lithium niobate are formed in an amorphous state on a substrate such as lithium niobate and can be readily etched by conventional liquid or dry etchants. The amorphous film may then be converted by annealing to a crystalline form well suited to formation of electro-optical devices.
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申请公布号 |
US2002182322(A1) |
申请公布日期 |
2002.12.05 |
申请号 |
US20020097441 |
申请日期 |
2002.03.14 |
申请人 |
MCCAUGHAN LEON;KUECH THOMAS F.;SAULYS DOVAS A.;JOSHKIN VLADIMIR A.;CHOWDHURY AREF |
发明人 |
MCCAUGHAN LEON;KUECH THOMAS F.;SAULYS DOVAS A.;JOSHKIN VLADIMIR A.;CHOWDHURY AREF |
分类号 |
G02F1/03;G02F1/035;G02F1/05;G02F1/225;(IPC1-7):C23C16/00 |
主分类号 |
G02F1/03 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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