发明名称 STRAIN-RELIEVED TUNABLE DIELECTRIC THIN FILMS
摘要 Tunable dielectric thin films are provided which possess low dielectric losses at microwave frequencies relative to conventional dielectric thin films. The thin films include a low dielectric loss substrate, a buffer layer, and a crystalline dielectric film. Barium strontium titanate may be used as the buffer layer and the crystalline dielectric film. The buffer layer provides strain relief during annealing operations.
申请公布号 WO02084779(A3) 申请公布日期 2002.12.05
申请号 WO2002US11361 申请日期 2002.04.11
申请人 PARATEK MICROWAVE, INC. 发明人 CHANG, WONTAE
分类号 C23C14/08;H01P1/18;H01P7/08 主分类号 C23C14/08
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