发明名称 |
Pyrolytic boron nitride crucible and method |
摘要 |
A method of forming a pyrolytic boron nitride (PBN) article and an article having layers of PBN separated by layers of PBN having a dopant of sufficient concentration to induce peeling, the steps of introducing vapors of ammonia and a gaseous boron halide in a suitable ratio into a heated furnace reactor to cause boron nitride to be deposited in layers on a substrate, with at least one gaseous dopant injected into furnace at controlled periodic interval(s) such that at least two selected layers of boron nitride are doped with said gaseous dopant(s) at a minimum average concentration of 2 atomic wt % at a depth ranging from 1000 to 2000 angstroms in each selected layer, and with the selected layers spaced apart about 0.1 micron to 100 microns apart.
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申请公布号 |
US2002182394(A1) |
申请公布日期 |
2002.12.05 |
申请号 |
US20010865395 |
申请日期 |
2001.05.24 |
申请人 |
ADVANCED CERAMICS CORPORATION |
发明人 |
SANE AJIT Y.;LENNARTZ JEFFREY;MOORE ARTHUR;DEVAN THOMAS |
分类号 |
C01B21/064;C04B35/583;C04B41/50;C04B41/87;C23C16/34;C23C16/38;C23C16/44;C23C16/455;C30B11/00;C30B15/10;C30B35/00;(IPC1-7):B32B9/00 |
主分类号 |
C01B21/064 |
代理机构 |
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地址 |
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