发明名称 SEMICONDUCTOR WAFER DESIGNED TO AVOID PROBED MARKS WHILE TESTING
摘要 A semiconductor wafer is disclosed for avoiding probed marks while testing. The wafer has a plurality of metal interconnects, each metal interconnect connecting underlying bonding pad, corresponding contact pad and test pad. Each contact pad being outer electrical connection terminal is connected in series by a metal interconnect between test pad and bonding pad, so that the section of the metal interconnect between bonding pad and contact pad enable be tested during probing the test pad. Furthermore, there is no probing mark on the contact pad.
申请公布号 US2002180026(A1) 申请公布日期 2002.12.05
申请号 US20010873420 申请日期 2001.06.05
申请人 CHIPMOS TECHNOLOGIES INC. 发明人 LIU AN-HONG;TSENG YUAN-PING
分类号 G01R31/28;H01L23/544;(IPC1-7):H01L23/58 主分类号 G01R31/28
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