| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing device for making finishing accuracy of a workpiece high accurate and a polishing method using the device. SOLUTION: This device is constituted of a pair of lapping tape supplying/ winding means 64 and 65 for supplying a lapping tape 70 from a supply side and winding the supplied lapping tape 70, a lapping tape holding base 77 which is arranged between the pair of the lapping tape supplying/winding means 64 and 65 and finishes a lapping tape traveling surface with high accuracy, a lapping tape traveling and holding mechanism A for imparting tension to the lapping tape laid on the lapping tape holding base 77, a moving mechanism B holding the traveling and holding mechanism A and moving in a direction crossing the traveling direction of the lapping tape, and slide mechanisms 81, 82, 83, 84 and 85 having rotation means 78 and 80 for rotating the workpiece 44 in a state of the workpiece 44 abutted on the lapping tape 70 within the traveling and holding mechanism A. |
