发明名称 LIGHT IRRADIATION DEVICE
摘要 PROBLEM TO BE SOLVED: To irradiate an irradiation region with desired irradiance and desired illuminance distribution in a light irradiation device having a plurality of rod- shaped lamps. SOLUTION: In the light irradiation device 1 which irradiates the irradiation region set on a surface to be irradiated with light from a plurality of lamps L1 and L2 by overlapping with each other, the optical sensors S1 and S2 of the number corresponding to the number of lines of the lamps L1 and L2 are prepared and arranged so that only each optical sensor S1 and S2 is irradiated with the light of the corresponding lamps L1 and L2. Then, signals from the optical sensors S1 and S2 are inputted in a control part (not shown), and electric power to be supplied to the corresponding lamps from a lamp power source is controlled on the basis of the signal from each optical sensor S1 and S2 corresponding to each lamp L1 and L2.
申请公布号 JP2002351083(A) 申请公布日期 2002.12.04
申请号 JP20010152215 申请日期 2001.05.22
申请人 USHIO INC 发明人 YONEJIMA KUNIHIRO
分类号 G01J1/00;G01J1/02;G01J1/06;G01J1/42;G03F7/20;(IPC1-7):G03F7/20 主分类号 G01J1/00
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