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发明名称
Microwave plasma processing apparatus and microwave plasma processing method
摘要
申请公布号
EP0764969(B1)
申请公布日期
2002.12.04
申请号
EP19960115091
申请日期
1996.09.19
申请人
CANON KABUSHIKI KAISHA
发明人
SUZUKI, NOBUMASA
分类号
C23C16/50;C23C16/511;H01J37/32;H01L21/3065;(IPC1-7):H01J37/32
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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