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发明名称
摘要
申请公布号	JP3353725(B2)	申请公布日期	2002.12.03
申请号	JP19980323522	申请日期	1998.11.13
申请人		发明人
分类号	G01R31/26;G01D1/02;G01R31/00;H01L27/14;(IPC1-7):G01R31/00	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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