发明名称 Wavelength-stabilized light source apparatus
摘要 A part of the output light from a semiconductor laser (1), which has a wavelength controllably variable with an injection current, is split at a beam splitter (3) and introduced into a interference optical system (5). In order to vary an optical path length difference between two light beams in the interference optical system (5) to modulate interference fringes to be obtained, AOMs (55, 56) are arranged on the two split optical paths and an EOM (56) on one of them. The interference fringes obtained from the interference optical system (5) are received at a photoreceptive device (7), and from the received signal, the phase is detected by a phase detector (8) and the phase amplitude is detected by an amplitude extractor (9). In order to stabilize the wavelength, a controller (10) feedback controls the injection current to the semiconductor laser (1) so that the phase amplitude matches to a predetermined setting.
申请公布号 US6490300(B1) 申请公布日期 2002.12.03
申请号 US20000610221 申请日期 2000.07.03
申请人 MITUTOYO CORPORATION 发明人 NISHIOKI NOBUHISA;OKAMOTO KIYOKAZU
分类号 G01B9/02;G01B11/02;H01S5/0687;(IPC1-7):H01S3/13 主分类号 G01B9/02
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