发明名称 DEVICE AND METHOD FOR SEPARATING PLATE MEMBER
摘要 PURPOSE: To support a plate member such as a laminated board, without contacting with its one side in horizontal state, and also efficiently proceeding with the separation. CONSTITUTION: The laminated board 50, which is made by laminating a seed board 100 and a handle board 20, is arranged, with the seed board below, so that separation is made. In the first stage, the center of the bottom of the laminated board 50 is sucked for support with a first board support 101, and the periphery is separated. Then, in the second stage, the periphery and the flank of the laminated board 50 is supported with the second board support 102, and the center is separated.
申请公布号 KR20020090151(A) 申请公布日期 2002.11.30
申请号 KR20020028641 申请日期 2002.05.23
申请人 CANON KABUSHIKI KAISHA 发明人 FUJIMOTO AKIRA;KOHDA MITSUHARU;SAKAGUCHI KIYOFUMI;YANAGITA KAZUTAKA
分类号 H01L27/08;H01L21/00;H01L21/02;H01L21/20;H01L21/265;H01L21/301;H01L27/12;(IPC1-7):H01L21/20 主分类号 H01L27/08
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